Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491569 | Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMP | John A. Adams | 2002-12-10 |
| 6361646 | Method and apparatus for endpoint detection for chemical mechanical polishing | John A. Adams, Robert A. Eaton | 2002-03-26 |