Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500055 | Oscillating orbital polisher and method | Everett D. Smith, Stephen C. Schultz | 2002-12-31 |
| 6491569 | Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMP | Thomas F. A. Bibby | 2002-12-10 |
| 6427071 | Apparatus and method for providing transporting for a control signal | Robert A. Ruby, Richard Zaffino | 2002-07-30 |
| 6395130 | Hydrophobic optical endpoint light pipes for chemical mechanical polishing | Robert A. Eaton, John C. Ptak | 2002-05-28 |
| 6387807 | Method for selective removal of copper | Richard Faubert | 2002-05-14 |
| 6361646 | Method and apparatus for endpoint detection for chemical mechanical polishing | Thomas F. A. Bibby, Robert A. Eaton | 2002-03-26 |