Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368183 | Wafer cleaning apparatus and associated wafer processing methods | Daniel Ray Trojan, Periya Gopalan | 2002-04-09 |
| 6364745 | Mapping system for semiconductor wafer cassettes | Jose R. Gonzalez-Martin, Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard +5 more | 2002-04-02 |
| 6350177 | Combined CMP and wafer cleaning apparatus and associated methods | Jose R. Gonzalez-Martin, Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard +5 more | 2002-02-26 |