Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390897 | Cleaning station integral with polishing machine for semiconductor wafers | Jose R. Gonzalez-Martin | 2002-05-21 |
| 6364745 | Mapping system for semiconductor wafer cassettes | Jose R. Gonzalez-Martin, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2002-04-02 |
| RE37622 | Wafer polishing method and apparatus | Anthony G. Van Woerkom, Shigeru Odagiri, Isao Nagahashi | 2002-04-02 |
| 6350177 | Combined CMP and wafer cleaning apparatus and associated methods | Jose R. Gonzalez-Martin, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2002-02-26 |