TA

Toru Asai

SP Speedfam-Ipec: 1 patents #25 of 65Top 40%
📍 Ayase, JP: #8 of 26 inventorsTop 35%
Overall (2002): #101,240 of 266,432Top 40%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6402596 Single-side polishing method for substrate edge, and apparatus therefor Shunji Hakomori, Noriaki Mizuno 2002-06-11