Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478660 | Apparatus of and method for polishing the outer circumferential portions of a circular plate-shaped work | Noriaki Mizuno, Hiroshi Nishi | 2002-11-12 |
| 6422930 | Apparatus for removing deposited film | — | 2002-07-23 |
| 6402596 | Single-side polishing method for substrate edge, and apparatus therefor | Toru Asai, Noriaki Mizuno | 2002-06-11 |