TO

Tadayoshi Okuya

SC Speedfam Co.: 1 patents #3 of 7Top 45%
Overall (2002): #107,644 of 266,432Top 45%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6429399 Discharge tube for a local etching apparatus and a local etching apparatus using the discharge tube Michihiko Yanagisawa 2002-08-06