Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492268 | Method of forming a copper wiring in a semiconductor device | — | 2002-12-10 |
| 6468907 | Method of manufacturing a copper wiring in a semiconductor device | — | 2002-10-22 |
| 6436826 | Method of forming a metal wiring in a semiconductor device | — | 2002-08-20 |
| 6413864 | Method of manufacturing a copper metal wiring in a semiconductor device | — | 2002-07-02 |
| 6376356 | Method of manufacturing a metal wiring in a semiconductor device | — | 2002-04-23 |
| 6349887 | Liquid delivery system | — | 2002-02-26 |
| 6346478 | Method of forming a copper wiring in a semiconductor device | Heon Do Kim | 2002-02-12 |
| 6337276 | Methods of forming a copper wiring in a semiconductor device using chemical vapor deposition | — | 2002-01-08 |