Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475913 | Method for forming damascene type of metal wires in semiconductor devices | — | 2002-11-05 |
| 6423637 | Method of manufacturing copper wiring in a semiconductor device | — | 2002-07-23 |
| 6346478 | Method of forming a copper wiring in a semiconductor device | Sung Gyu Pyo | 2002-02-12 |