Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499297 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Xing YANG, Xuan-Qi Wang | 2002-12-31 |
| 6345502 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Xing YANG, Xuan-Qi Wang | 2002-02-12 |
| 6334761 | Check-valved silicon diaphragm pump and method of fabricating the same | Yu-Chong Tai, Ellis Meng, Xuan-Qi Wang | 2002-01-01 |