Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499297 | Micromachined parylene membrane valve and pump | Xing YANG, Charles I. Grosjean, Xuan-Qi Wang | 2002-12-31 |
| 6470904 | Normally closed in-channel micro check valve | Xuan-Qi Wang | 2002-10-29 |
| 6436229 | Gas phase silicon etching with bromine trifluoride | Xuan Wang | 2002-08-20 |
| 6428053 | Micromachined fluidic coupler and method of making the same | Shuyun Wu | 2002-08-06 |
| 6345502 | Micromachined parylene membrane valve and pump | Xing YANG, Charles I. Grosjean, Xuan-Qi Wang | 2002-02-12 |
| 6334761 | Check-valved silicon diaphragm pump and method of fabricating the same | Ellis Meng, Xuan-Qi Wang, Charles I. Grosjean | 2002-01-01 |