Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344114 | Magnetron sputtering cathode with magnet disposed between two yoke plates | Eggo Sichmann, Michael L. Muecke, Wolfgang Becker | 2002-02-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344114 | Magnetron sputtering cathode with magnet disposed between two yoke plates | Eggo Sichmann, Michael L. Muecke, Wolfgang Becker | 2002-02-05 |