Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344114 | Magnetron sputtering cathode with magnet disposed between two yoke plates | Michael L. Muecke, Wolfgang Becker, Klaus Truckenmueller | 2002-02-05 |
| 6338781 | Magnetron sputtering cathode with magnet disposed between two yoke plates | Michaell Muecke | 2002-01-15 |