Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387829 | Separation process for silicon-on-insulator wafer fabrication | William N. Carr | 2002-05-14 |
| 6368938 | Process for manufacturing a silicon-on-insulator substrate and semiconductor devices on said substrate | — | 2002-04-09 |
| 6355493 | Method for forming IC's comprising a highly-resistive or semi-insulating semiconductor substrate having a thin, low resistance active semiconductor layer thereon | — | 2002-03-12 |
| 6352909 | Process for lift-off of a layer from a substrate | — | 2002-03-05 |
| 6346459 | Process for lift off and transfer of semiconductor devices onto an alien substrate | William N. Carr | 2002-02-12 |
| 6344417 | Method for micro-mechanical structures | — | 2002-02-05 |