Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495877 | Metal capacitors with damascene structures and method for forming the same | Chen-Chiu Hsue | 2002-12-17 |
| 6495448 | Dual damascene process | — | 2002-12-17 |
| 6492226 | Method for forming a metal capacitor in a damascene process | Chen-Chiu Hsue | 2002-12-10 |
| 6486059 | Dual damascene process using an oxide liner for a dielectric barrier layer | Chen-Chiu Hsue | 2002-11-26 |
| 6483142 | Dual damascene structure having capacitors | Chen-Chiu Hsue | 2002-11-19 |
| 6472306 | Method of forming a dual damascene opening using CVD Low-K material and spin-on-polymer | Chung-I Chang | 2002-10-29 |
| 6410386 | Method for forming a metal capacitor in a damascene process | Chen-Chiu Hsue, Jen-Hann Tsai | 2002-06-25 |
| 6391713 | Method for forming a dual damascene structure having capacitors | Chen-Chiu Hsue | 2002-05-21 |
| 6376392 | PECVD process for ULSI ARL | Chung-I Chang, Hung-Wen Chiou | 2002-04-23 |
| 6358792 | Method for fabricating metal capacitor | Chen-Chiu Hsue | 2002-03-19 |
| 6338999 | Method for forming metal capacitors with a damascene process | Chen-Chiu Hsue | 2002-01-15 |