Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472306 | Method of forming a dual damascene opening using CVD Low-K material and spin-on-polymer | Shyh-Dar Lee | 2002-10-29 |
| 6376392 | PECVD process for ULSI ARL | Shyh-Dar Lee, Hung-Wen Chiou | 2002-04-23 |