Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451667 | Self-aligned double-sided vertical MIMcap | — | 2002-09-17 |
| 6440753 | Metal hard mask for ILD RIE processing of semiconductor memory devices to prevent oxidation of conductive lines | Joachim Nuetzel | 2002-08-27 |