Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440753 | Metal hard mask for ILD RIE processing of semiconductor memory devices to prevent oxidation of conductive lines | Xian J. Ning | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440753 | Metal hard mask for ILD RIE processing of semiconductor memory devices to prevent oxidation of conductive lines | Xian J. Ning | 2002-08-27 |