Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499427 | Plasma CVD apparatus | Shunpei Yamazaki, Toru Takayama, Hisashi Abe, Hiroshi Uehara, Mika Ishiwata | 2002-12-31 |
| 6482752 | Substrate processing apparatus and method and a manufacturing method of a thin film semiconductor device | Shunpei Yamazaki, Hisashi Ohtani, Hiroyuki Shimada, Hisashi Abe, Satoshi Teramoto | 2002-11-19 |
| 6396078 | Semiconductor device with a tapered hole formed using multiple layers with different etching rates | Hideki Uochi, Masahiko Hayakawa, Toshimitsu Konuma, Shunpei Yamazaki | 2002-05-28 |
| 6337229 | Method of making crystal silicon semiconductor and thin film transistor | Shunpei Yamazaki, Yasuhiko Takemura | 2002-01-08 |