Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499427 | Plasma CVD apparatus | Shunpei Yamazaki, Toru Takayama, Mitsunori Sakama, Hiroshi Uehara, Mika Ishiwata | 2002-12-31 |
| 6482752 | Substrate processing apparatus and method and a manufacturing method of a thin film semiconductor device | Shunpei Yamazaki, Hisashi Ohtani, Hiroyuki Shimada, Mitsunori Sakama, Satoshi Teramoto | 2002-11-19 |