Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395347 | Micromachining method for workpiece observation | Tatsuya Adachi, Takashi Kaito, Kouji Iwasaki | 2002-05-28 |
| 6365905 | Focused ion beam processing apparatus | Kazuo Aita | 2002-04-02 |
| 6348689 | Focused ion beam apparatus | — | 2002-02-19 |