Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6467426 | Photomask correction device | Osamu Takaoka | 2002-10-22 |
| 6392230 | Focused ion beam forming method | — | 2002-05-21 |
| 6365905 | Focused ion beam processing apparatus | Yoshihiro Koyama | 2002-04-02 |