Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6392756 | Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate | Guoguang Li, Hongwei Zhu, Dale A. Harrison, Abdul Rahim Forouhi | 2002-05-21 |