Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6392756 | Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate | Hongwei Zhu, Dale A. Harrison, Abdul Rahim Forouhi, Weilu Xu | 2002-05-21 |
| 6379014 | Graded anti-reflective coatings for photolithography | Dale A. Harrison, Abdul Rahim Forouhi | 2002-04-30 |