Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368674 | Method of fabricating a support with dry deposited compounds thereon | Zvi G. Loewy, Bawa Singh | 2002-04-09 |
| 6370005 | Electrostatic sensing chuck using area matched electrodes | Hoi-Cheong Steve Sun, Nitin V. Desai, David Norman Ludington, Timothy Allen Pletcher, David Keller +3 more | 2002-04-09 |