Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6370005 | Electrostatic sensing chuck using area matched electrodes | Hoi-Cheong Steve Sun, Nitin V. Desai, William R. Roach, David Norman Ludington, Timothy Allen Pletcher +3 more | 2002-04-09 |