Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495055 | Variable time etching system according to the accumulated number of devices being processed and a method for etching in the same manner | Jung-Taek Lim, Soo Won Lee, Jin-Soo Kim | 2002-12-17 |
| 6371716 | Apparatus and method for unloading substrates | Jong-Beom An, Sung-Cue Choi | 2002-04-16 |