Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495055 | Variable time etching system according to the accumulated number of devices being processed and a method for etching in the same manner | Sung-Joon Byun, Soo Won Lee, Jin-Soo Kim | 2002-12-17 |