Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498092 | Method of making a semiconductor device having dual damascene line structure using a patterned etching stopper | Kyung-Tae Lee | 2002-12-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498092 | Method of making a semiconductor device having dual damascene line structure using a patterned etching stopper | Kyung-Tae Lee | 2002-12-24 |