Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498092 | Method of making a semiconductor device having dual damascene line structure using a patterned etching stopper | Seong-ho Liu | 2002-12-24 |
| 6492260 | Method of fabricating damascene metal wiring | Young-Wug Kim | 2002-12-10 |