Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435428 | Showerhead apparatus for radical-assisted deposition | Jae-Ho Kim, In Chel Shin, Sang-Joon Park, Kwan Goo Rha | 2002-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435428 | Showerhead apparatus for radical-assisted deposition | Jae-Ho Kim, In Chel Shin, Sang-Joon Park, Kwan Goo Rha | 2002-08-20 |