Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435428 | Showerhead apparatus for radical-assisted deposition | Jae-Ho Kim, In Chel Shin, Sang-Joon Park, Sang-Ho Kim | 2002-08-20 |
| 6376893 | Trench isolation structure and fabrication method thereof | — | 2002-04-23 |