Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454563 | Wafer treatment chamber having thermal reflector | Jung-Su Lim, Yong-Woon Son, Heung-ahn Kwon | 2002-09-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454563 | Wafer treatment chamber having thermal reflector | Jung-Su Lim, Yong-Woon Son, Heung-ahn Kwon | 2002-09-24 |