Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454563 | Wafer treatment chamber having thermal reflector | Jung-Su Lim, Kang-Wook Moon, Yong-Woon Son | 2002-09-24 |
HK
Heung-ahn Kwon
Overall (2002): #208,374 of 266,432Top 80%
1
Patents 2002