Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454634 | Polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Lee Melbourne Cook, Peter A. Burke | 2002-09-24 |
| 6361409 | Polymeric polishing pad having improved surface layer and method of making same | Arun Vishwanathan | 2002-03-26 |