Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490025 | Exposure apparatus | Susumu Makinouchi | 2002-12-03 |
| 6472840 | Vibration cancellation apparatus and exposure apparatus | — | 2002-10-29 |
| 6441884 | Projection exposure apparatus | Futoshi Mori | 2002-08-27 |
| 6442480 | Method and device for acquiring azimuth information | — | 2002-08-27 |
| 6392741 | Projection exposure apparatus having active vibration isolator and method of controlling vibration by the active vibration isolator | Futoshi Mori | 2002-05-21 |
| 6382419 | Wafer container box | Yoshiaki Fujimori | 2002-05-07 |