Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441884 | Projection exposure apparatus | Masato Takahashi | 2002-08-27 |
| 6392741 | Projection exposure apparatus having active vibration isolator and method of controlling vibration by the active vibration isolator | Masato Takahashi | 2002-05-21 |