Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478659 | Chemical mechanical polishing method for slurry free fixed abrasive pads | Cheng-An Peng | 2002-11-12 |
| 6432728 | Method for integration optimization by chemical mechanical planarization end-pointing technique | Shuo Yen Tai, Ming-Cheng Yang, Champion Yi | 2002-08-13 |