Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461226 | Chemical mechanical polishing of a metal layer using a composite polishing pad | — | 2002-10-08 |
| 6432728 | Method for integration optimization by chemical mechanical planarization end-pointing technique | Shuo Yen Tai, Ming-Cheng Yang, Jiun-Fang Wang | 2002-08-13 |