Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444524 | Method for forming a trench capacitor | Sheng Fen Chiu, Hsiao-Lei Wang | 2002-09-03 |
| 6391706 | Method for making deep trench capacitors for DRAMs with reduced faceting at the substrate edge and providing a more uniform pad Si3N4layer across the substrate | Chao-Chueh Wu, Sheng Fen Chiu, Hsiao-Lei Wang | 2002-05-21 |