Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391804 | Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactor | Robert W. Grant, Benjamin J. Petrone, Ronald F. Klopp, Paul D. Mumbauer | 2002-05-21 |