Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428847 | Vortex based CVD reactor | Robert W. Grant, Matthew D. Brubaker, Paul D. Mumbauer | 2002-08-06 |
| 6391804 | Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactor | Robert W. Grant, Ronald F. Klopp, Theodore E. Farley, Paul D. Mumbauer | 2002-05-21 |