Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489585 | Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus | Kosuke Nakamura, Yasushi Sawada, Hiroaki Kitamura | 2002-12-03 |
| 6429400 | Plasma processing apparatus and method | Yasushi Sawada, Keiichi Yamazaki, Sachiko Okazaki, Masuhiro Kogoma | 2002-08-06 |
| 6424091 | Plasma treatment apparatus and plasma treatment method performed by use of the same apparatus | Yasushi Sawada, Kosuke Nakamura, Hiroaki Kitamura | 2002-07-23 |