Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465964 | Plasma treatment apparatus and plasma generation method using the apparatus | Noriyuki Taguchi, Yasushi Sawada, Yoshiyuki Nakazono, Yukiko Inooka, Kazuya KITAYAMA | 2002-10-15 |
| 6429400 | Plasma processing apparatus and method | Yasushi Sawada, Yoshitami Inoue, Sachiko Okazaki, Masuhiro Kogoma | 2002-08-06 |