Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461776 | Resist pattern forming method using anti-reflective layer, with variable extinction coefficient | Toshihiko Tanaka, Naoko Asai | 2002-10-08 |
| 6355400 | Resist pattern forming method using anti-reflective layer, resist pattern formed, and method of etching using resist pattern and product formed | Toshihiko Tanaka, Naoko Asai | 2002-03-12 |