Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501545 | Defect detecting apparatus | Takahiro KOMURO, Haruyuki Tsuji, Yasutada Miura | 2002-12-31 |
| 6495870 | Semiconductor device and method for patterning the semiconductor device in which line patterns terminate at different lengths to prevent the occurrence of a short or break | Tomonori Sekiguchi, Toshiaki Yamanaka, Takeshi Sakata, Katsutaka Kimura | 2002-12-17 |
| 6461776 | Resist pattern forming method using anti-reflective layer, with variable extinction coefficient | Shoichi Uchino, Naoko Asai | 2002-10-08 |
| 6440507 | Unsymmetrical dioxazine compound dichroic dye liquid crystal composition and liquid crystal display element | Toru Ashida | 2002-08-27 |
| 6355400 | Resist pattern forming method using anti-reflective layer, resist pattern formed, and method of etching using resist pattern and product formed | Shoichi Uchino, Naoko Asai | 2002-03-12 |