Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471845 | Method of controlling chemical bath composition in a manufacturing environment | John O. Dukovic, William E. Corbin, Jr., Erick G. Walton, Peter S. Locke, Panayotis Andricacos +2 more | 2002-10-29 |
| 6436249 | Clamshell apparatus for electrochemically treating semiconductor wafers | Wayne Fetters | 2002-08-20 |
| 6402923 | Method and apparatus for uniform electroplating of integrated circuits using a variable field shaping element | Steven T. Mayer, Richard Hill, Alain Harrus, Robert J. Contolini, Steve Taatjes +1 more | 2002-06-11 |
| 6343793 | Dual channel rotary union | Wayne Fetters | 2002-02-05 |