Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426508 | Surface-position detection device, a projection exposure apparatus using the device, and a device manufacturing method using the apparatus | Yuji Kosugi | 2002-07-30 |
YY
Yuichi Yamada
Overall (2002): #82,848 of 266,432Top 35%
1
Patents 2002