Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426508 | Surface-position detection device, a projection exposure apparatus using the device, and a device manufacturing method using the apparatus | Yuichi Yamada | 2002-07-30 |
| 6376970 | Piezoelectric resonator supporting structure and a piezoelectric component including the same | Shigemasa Kusabiraki, Takeshi Yamazaki, Takeshi Kubo | 2002-04-23 |