Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444327 | Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film | Hiroshi Tanabe | 2002-09-03 |
| 6444508 | Method of manufacturing thin film transistor | Hiroshi Tanabe, Hiroshi Okumura, Yoshinobu Sato | 2002-09-03 |
| 6436487 | Method for depositing a silicon oxide film | Manabu Ikemoto | 2002-08-20 |
| 6383299 | Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film | Hiroshi Tanabe | 2002-05-07 |